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The CDT Technology Development Centre is well equipped with state-of-the-art equipment designed to provide a flexible P-OLED proving ground for CDT and its license partners. The equipment provides a realistic environment for simulation of high volume display manufacturing plants.
Facilities
600m2 clean room
400m2 test and assembly area
Team of >50 people - scientists, engineers and support staff
Capability
Substrate materials - Glass, ITO on glass or Anode metal/ITO on glass
Cleaning of substrates & masks
Spin coating of photoresist materials with 14" Karl Suss Spinner
Alignment to +/- 3µm and UV exposure with TopCon mask aligner
Substrate patterning development - Pixel bank structures and Lift-Off processes (SSEC tools)
Etching of MoCr, Al and ITO (SSEC tools)
Photoresist stripping (SSEC tools)
Particle and defect mapping for size using Orbotech
Film uniformity measurement (Nanospec)
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Ink and device development
Ink formalations for improved display quality and reduced defectivity
Inkjet inks with excellent drop directionality and jetting stability over time, optimised to fill pixels with flat uniform swathe-free films
Inkjet printed test cells with optimised display uniformity and lifetimes equivalent to spin coated devices
Ink formulations for display manufacturing optimised for high frequency jetting
Development of inks and processes to ensure lonf term performance of ink and displays
Ink jet printing:
Printing onto a patterned and cleaned glass substrate (active or passive matrix)
Polymer inks formulated to optimise jetting, film forming and device performance
Substrate surface treatment for ink containment using plasma tools
Inkjet printing with six high accuracy printers to a drop placement accuracy < ±5µm
Process metrology:
Mitutoyo metrology system for measuring ink drop placement
Litrex 40J jetting characteristics
Zygo white light interferometer to measure the profiles of dried ink films
Spin coating:
Spinning onto ITO coated glass substrates
Cleaning and surface treatment by UV/Ozone
Spin coating, drying and baking of multiple inks to form three discrete layers
DekTak profileometer for stylus measurement of film thickness
Film thickness uniformity control of ± 2nm
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Cathode Deposition and Encapsulation
 Integrated double cluster tool for cathode deposition and encapsulation
Cathode deposition by evaporation for metals and sputtering for transparent oxides
Single cluster tool for cathode deposition with encapsulation under nitrogen
Encapsulation by glass-on-glass or glass cans including getters
Robotic adhesive dispense with automated UV curing
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Assembly and test
Scribing and breaking of 14" plate capacity into singulated displays or test cells
Tab bonding of displays for electrical connection
Manual pinning of test cells for performance testing of polymer materials
Test systems:
Unibench system to record device images, color
co-ordinates and color factors
Two IVL rigs record device current, voltage and
luminance characteristics
Prometric camera for luminance emission uniformity analysis
Throughput capability of over 700 test cells per week
Lifetime testing capability of 470 dc driven and 240 pulsed
32 additional devices can be lifetime tested at elevated temperatures
Device failure analysis and defect mapping
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Technology Transfer
Detailed information needed to set up successful P-OLED display processes
Process Design, Implementation and Control:
Front end of line (photolithography and Etch)
Polymer desposition (spin coating and inkjet printing)
Back end of line (cathode deposition and encapsulation)
Assembly and test
Failure and yield analysis
Additional facilities
A sophisticated data collection system is employed as part of the manufacturing control software, which ensures full traceability and control of trials. As all reliability and product performance data is also gathered, it is possible to correlate large amounts of process data with display results, to find optimum process windows and ensure high yield and capable processes.
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